Analysis of a micro-resonant pressure sensor with docked clamped-clamped micro-beam

A resonance based micro pressure sensor is designed and simulated an analytical overview of its working presented. The resonator used electrostatically actuated clamped-clamped (cc) beam supported over docks. correlation between stress in micro-resonator width docs the support structure evaluated. It compared to a without it found that with provides better sensitivity. Performance device evaluated for variation various parameters such as doc width, voltage, length, height thickness beam. comparative study presented impact on resonant frequency fundamental mode sensitivity device.The helped obtain pattern cc sensor. showed how natural 241 kHz increased or decreased inapplied dimensional operational parameters.